Dr. Jae-Min Kim
at Yosu Natl Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Thin films, Sensors, Annealing, Ceramics, Silicon, Reliability, Resistance, Tolerancing, Environmental sensing, Temperature metrology

PROCEEDINGS ARTICLE | April 2, 2004
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Thin films, Argon, Sputter deposition, Glasses, Annealing, Interfaces, Silicon, Sodium, Thin film deposition

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