Dr. Jae-Min Kim Profile

Dr. Jae-Min Kim

at Yosu Natl Univ

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Publications (2)

Proceedings Article | 2 April 2004 Paper

Anodic bond characteristics of Si-wafer and MLCA using Pyrex #7740 glass intermediate layer

Gwiy-Sang Chung, Jae-min Kim

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522858

KEYWORDS: Glasses, Silicon, Thin films, Microelectromechanical systems, Sputter deposition, Thin film deposition, Argon, Sodium, Annealing, Interfaces

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Proceedings Article | 2 April 2004 Paper

Fabrication of micromachined ceramic thin-film-type pressure sensors for overpressure tolerance and its characteristics

Gwiy-Sang Chung, Jae-Min Kim

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522876

KEYWORDS: Thin films, Sensors, Ceramics, Silicon, Annealing, Resistance, Tolerancing, Temperature metrology, Environmental sensing, Reliability

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