Mr. Jae-Pil Shin Profile

Jae-Pil Shin

at SAMSUNG Electronics Co Ltd

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Publications (7)

Proceedings Article | 16 March 2016 Paper

Interlayer design verification methodology using contour image

Minyoung Shim, Seoksan Kim, Sungmin Park, Seiryung Choi, Namjung Kang, Hyunju Sung, Jinwoo Choi, Jaepil Shin, Jaekyun Park, Myoungseob Shim, Hyeongsun Hong, Kyupil Lee

Proceedings Volume 9781, 97810V (2016) https://doi.org/10.1117/12.2218477

KEYWORDS: Statistical analysis, Nondestructive evaluation, Inspection, Semiconducting wafers, Bridges, Visualization, Design for manufacturability, Manufacturing, Neodymium, Etching, Semiconductors, Electronics

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Proceedings Article | 30 June 2012 Paper

Fast layout processing methodologies for scalable distributed computing applications

Chang-woo Kang, Jae-pil Shin, Bhardwaj Durvasula, Sang-won Seo, Dae-hyun Jung, Jong-bae Lee, Young-kwan Park

Proceedings Volume 8441, 84410Q (2012) https://doi.org/10.1117/12.954019

KEYWORDS: Distributed computing, Databases, Optical proximity correction, Binary data, Extreme ultraviolet, Lithography, Scattering, Neck, Electronic design automation, Data processing

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As the feature size shrinks to sub-20nm, more advanced OPC technologies such as ILT and the new lithographic resolution by EUV become the key solutions for device fabrication. These technologies leads to the file size explosion of up to hundreds of gigabytes of GDSII and OASIS files mainly due to the addition of complicated scattering bars and flattening of the design to compensate for long range effects. Splitting and merging layout files have been done sequentially in typical distributed computing layout applications. This portion becomes the bottle neck, causing the scalability to become poor. According to the Amdahl's law, minimizing the portion of sequential part is the key to get the maximum speed up. In this paper, we present scalable layout dividing and merging methodologies: Skeleton file based querying and direct OASIS file merging. These methods not only use a very minimum memory footprint but also achieve remarkable speed improvement. The skeleton file concept is very novel for a distributed application requiring geometrical processing, as it allows almost pseudo-random access into the input GDSII or OASIS file. Client machines can make use of the random access and perform fast query operations. The skeleton concept also works very well for flat input layouts, which is often the case of post-OPC data. Also, our OASIS file merging scheme is a smart approach which is equivalent of a binary file concatenation scheme. The merging method for OASIS files concatenates shape information in binary format with basic interpretation of bits with very low memory usage. We have observed that the skeleton file concept achieved 13.5 times speed improvement and used only 3.78% of memory on the master, over the conventional concept of converting into an internal format. Also, the merging speed is very fast, 28MB/sec and it is 44.5 times faster than conventional method. On top of the fast merging speed, it is very scalable since the merging time grows in linear fashion with respect to the file size. Our experiment setup includes hundreds of gigabytes of GDSII and OASIS files. We demonstrate in the paper, that the skeleton file based querying and direct OASIS file-merging schemes are very scalable for distributed computing applications for large volume layout. Additionally, we used embedded skeleton file scheme to improve file loading speed in layout viewer system and achieved 61 time speedup. We used Nirmaan, SoftJin's post-layout EDA toolkit for skeleton file based querying, OASIS file-merging and embedded skeleton file schemes.

Proceedings Article | 27 May 2010 Paper

A novel pattern error detecting algorithm for SEM images of mask monitoring patterns

Yoonna Oh, Jae-Pil Shin, Jin Choi, Jong-Bae Lee, Moon-Hyun Yoo

Proceedings Volume 7748, 77481L (2010) https://doi.org/10.1117/12.866273

KEYWORDS: Scanning electron microscopy, Photomasks, Inspection, Error analysis, Mask making, Binary data, Critical dimension metrology, Target detection, Edge detection

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Proceedings Article | 20 October 2006 Paper

A memory efficient large mask data handling method using repetition

Jin-Sook Choi, Jae-Pil Shin, Jong-Bae Lee, Moon-Hyun Yoo, Jeong-Taek Kong

Proceedings Volume 6349, 634918 (2006) https://doi.org/10.1117/12.686491

KEYWORDS: Photomasks, Visualization, Data modeling, Optical proximity correction, Model-based design, Data centers, Resolution enhancement technologies, Standards development, Software development, Computing systems

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Proceedings Article | 20 May 2006 Paper

Global pattern density control by resizing fill patterns for CD skew compensation

Jae-pil Shin, Jin-sook Choi, Sung-gyu Park, Jong-bae Lee, Moon-hyun Yoo, Jeong-taek Kong

Proceedings Volume 6283, 628339 (2006) https://doi.org/10.1117/12.681828

KEYWORDS: Control systems, Etching, Critical dimension metrology, Logic, Photomasks, Process engineering, Logic devices, Cadmium, Electronics, Bridges

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Proceedings Article | 28 June 2005 Paper

Chip level lithography verification system with artificial neural networks

Jae-pil Shin, Jin-sook Choi, Dae-hyun Jung, Jee-hyong Lee, Moon-hyun Yoo, Jeong-taek Kong

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617368

KEYWORDS: Neural networks, Lithography, Resolution enhancement technologies, Artificial neural networks, Optical proximity correction, SRAF, Error analysis, Critical dimension metrology, Cadmium, Photomasks

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Proceedings Article | 17 December 2003 Paper

Efficient mask data preparation for variable shaped e-beam writing system focusing on memory devices

Tae Jang, Jong-Bae Lee, Jae-Pil Shin, Kwang-Jai Yoo, Dai-Hyun Jung, Yong-Hee Park, Moon-Hyun Yoo, Jeong-Taek Kong

Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.517828

KEYWORDS: Data conversion, Data processing, Vestigial sideband modulation, Computer aided design, Critical dimension metrology, Mask making, Resolution enhancement technologies, Control systems, Raster graphics, Manufacturing

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Showing 5 of 7 publications

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