Dr. Jae Uk Lee
Post doctor at imec
SPIE Involvement:
Publications (20)

Proceedings Article | 28 April 2023 Paper
Proceedings Volume 12494, 124940X (2023) https://doi.org/10.1117/12.2658344
KEYWORDS: Source mask optimization, Reticles, Resolution enhancement technologies, Extreme ultraviolet lithography, SRAF, Logic, Semiconducting wafers, Design and modelling, Critical dimension metrology, Optical proximity correction, Printing

Proceedings Article | 28 April 2023 Presentation + Paper
Proceedings Volume 12494, 124940J (2023) https://doi.org/10.1117/12.2658260
KEYWORDS: Optical proximity correction, Stochastic processes, Semiconducting wafers, Modeling, Simulations, Design and modelling, Extreme ultraviolet lithography, Calibration, Logic, Lithography

Proceedings Article | 7 June 2022 Presentation
Proceedings Volume PC12054, PC1205402 (2022) https://doi.org/10.1117/12.2622565
KEYWORDS: Directed self assembly, Extreme ultraviolet lithography, Optical lithography, Extreme ultraviolet, Semiconductors, Semiconducting wafers, Lithography, Light-matter interactions

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12052, 120520F (2022) https://doi.org/10.1117/12.2615311
KEYWORDS: Metals, Fin field effect transistors, Semiconducting wafers, Optical lithography, 3D imaging standards, Integrated circuits, CMOS devices, Standards development, Field effect transistors, Etching

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12051, 120510P (2022) https://doi.org/10.1117/12.2614000
KEYWORDS: Photomasks, Optical proximity correction, SRAF, Logic, Nanoimprint lithography, Source mask optimization, Photovoltaics, Printing, Lens design, Semiconducting wafers

Showing 5 of 20 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top