Mr. Jae-Won Lee
Research Assistant at Univ of Wisconsin Madison
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 6, 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Polymers, Interfaces, Silicon, Convection, Photoresist processing, Semiconducting wafers, Radium, Thermal modeling, Temperature metrology

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Polymers, Interfaces, Silicon, Solids, Finite element methods, Analytical research, Photoresist processing, Semiconducting wafers, Thermal modeling

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