Dr. Jae-Hee Hwang
at SK Hynix Inc
SPIE Involvement:
Publications (3)

Proceedings Article | 26 March 2019 Presentation
Harm Dillen, Dorothe Oorschot, Marleen Kooiman, Willem van Mierlo, Ziyang Wang, Kang-San Lee, Jin-Woo Lee, Ruochong Fei, Shu-Yu Lai, Marc Kea, Inhwan Lee, Hwan Kim, Junghyun Kang, Jaehee Hwang, Chang-Moon Lim
Proceedings Volume 10959, 109591K (2019) https://doi.org/10.1117/12.2515487
KEYWORDS: Failure analysis, Critical dimension metrology, Metrology, Extreme ultraviolet lithography, Printing, Semiconducting wafers

Proceedings Article | 4 April 2017 Presentation + Paper
Jinhyuck Jun, Jaehee Hwang, Jaeseung Choi, Seyoung Oh, Chanha Park, Hyunjo Yang, Thuc Dam, Munhoe Do, Dong Chan Lee, Guangming Xiao, Jung-Hoe Choi, Kevin Lucas
Proceedings Volume 10148, 1014809 (2017) https://doi.org/10.1117/12.2257857
KEYWORDS: Lithography, Optical proximity correction, Optical lithography, Manufacturing, Photomasks, Semiconducting wafers, Atrial fibrillation, Source mask optimization, Image processing

Proceedings Article | 24 March 2016 Paper
Proceedings Volume 9778, 97781S (2016) https://doi.org/10.1117/12.2219467
KEYWORDS: Overlay metrology, Optical proximity correction, Diffraction, Critical dimension metrology, Metrology, Scanning electron microscopy, Electron microscopes, Optical lithography, Error analysis, Target detection

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