Prof. Jae W. Hahn
Professor at Yonsei Univ
SPIE Involvement:
Author
Publications (21)

SPIE Journal Paper | November 15, 2017
JM3 Vol. 16 Issue 04

PROCEEDINGS ARTICLE | November 17, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Etching, Argon, Dry etching, Chromium, Emission spectroscopy, Photomasks, Plasma etching, Critical dimension metrology, Chlorine, Plasma

SPIE Journal Paper | March 17, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Optical proximity correction, Bismuth, Lawrencium, Image segmentation, Model-based design, Detection and tracking algorithms, Neural networks, Optical lithography, Solids, Evolutionary algorithms

PROCEEDINGS ARTICLE | January 9, 2015
Proc. SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)
KEYWORDS: Infrared sensors, Mid-IR, Sensors, Spectroscopy, Infrared spectroscopy, Detector arrays, Black bodies, Infrared signatures, Infrared countermeasures, Diffraction gratings

PROCEEDINGS ARTICLE | January 9, 2015
Proc. SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)
KEYWORDS: Mirrors, Optical lithography, Image segmentation, Inspection, Optical inspection, Micromirrors, Photomasks, Charge-coupled devices, Maskless lithography, Digital micromirror devices

SPIE Journal Paper | December 18, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Motion analysis, Lithography, Plasmonics, Motion models, Line edge roughness, Molecules, Optical lithography, Molecular interactions, Near field scanning optical microscopy, Capillaries

Showing 5 of 21 publications
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