Prof. Jae W. Hahn
Professor at Yonsei Univ
SPIE Involvement:
Author
Publications (25)

SPIE Journal Paper | November 15, 2017
JM3 Vol. 16 Issue 04
KEYWORDS: Photomasks, Optical lithography, Source mask optimization, SRAF, Detection and tracking algorithms, Photovoltaics, Semiconducting wafers, Optical proximity correction, Computer simulations, Model-based design

PROCEEDINGS ARTICLE | September 25, 2017
Proc. SPIE. 10393, Radiation Detectors in Medicine, Industry, and National Security XVIII
KEYWORDS: Fabrication, Energy efficiency, Visible radiation, Particles, X-rays, Scintillators, Manufacturing, Image resolution, Image quality, Absorption

PROCEEDINGS ARTICLE | September 19, 2017
Proc. SPIE. 10403, Infrared Remote Sensing and Instrumentation XXV
KEYWORDS: Mid-IR, Data modeling, Databases, Infrared spectroscopy, Emission spectroscopy, Transmittance, Infrared radiation, Molecular spectroscopy, Environmental sensing, Thermodynamics

PROCEEDINGS ARTICLE | December 12, 2016
Proc. SPIE. 9973, Infrared Remote Sensing and Instrumentation XXIV
KEYWORDS: Infrared detectors, Metamaterials, Atmospheric laser remote sensing, Electromagnetic radiation, Infrared radiation, Missiles, Structural design, Atmospheric sensing, Atmospheric modeling, Absorption

PROCEEDINGS ARTICLE | November 17, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Etching, Argon, Dry etching, Chromium, Emission spectroscopy, Photomasks, Plasma etching, Critical dimension metrology, Chlorine, Plasma

PROCEEDINGS ARTICLE | November 3, 2016
Proc. SPIE. 9927, Nanoengineering: Fabrication, Properties, Optics, and Devices XIII
KEYWORDS: Electronics, Optical lithography, Nanoparticles, Metals, Particles, Copper, Silver, Manufacturing, Analytical research, Laser sintering

Showing 5 of 25 publications
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