Prof. Jae W. Hahn
Professor at Yonsei Univ
SPIE Involvement:
Author
Publications (20)

PROCEEDINGS ARTICLE | November 17, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Photomasks, Etching, Plasma, Chromium, Argon, Dry etching, Chlorine, Emission spectroscopy, Critical dimension metrology, Plasma etching

SPIE Journal Paper | March 17, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Optical proximity correction, Bismuth, Lawrencium, Image segmentation, Model-based design, Detection and tracking algorithms, Neural networks, Optical lithography, Solids, Evolutionary algorithms

PROCEEDINGS ARTICLE | January 9, 2015
Proc. SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)
KEYWORDS: Digital micromirror devices, Image segmentation, Optical inspection, Micromirrors, Photomasks, Inspection, Mirrors, Optical lithography, Charge-coupled devices, Maskless lithography

PROCEEDINGS ARTICLE | January 9, 2015
Proc. SPIE. 9444, International Seminar on Photonics, Optics, and Its Applications (ISPhOA 2014)
KEYWORDS: Spectroscopy, Infrared spectroscopy, Mid-IR, Sensors, Infrared signatures, Detector arrays, Black bodies, Diffraction gratings, Infrared countermeasures, Infrared sensors

SPIE Journal Paper | December 18, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Motion analysis, Lithography, Plasmonics, Motion models, Line edge roughness, Molecules, Optical lithography, Molecular interactions, Near field scanning optical microscopy, Capillaries

SPIE Journal Paper | August 25, 2014
JNP Vol. 8 Issue 01
KEYWORDS: Metals, Thin films, Gold, Plasmonics, Near field, Near field scanning optical microscopy, Quartz, Atomic force microscopy, Near field optics, Aluminum

Showing 5 of 20 publications
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