Dr. Jaehwa Jeong
at Korea Univ
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | September 20, 2012
JM3 Vol. 11 Issue 3
KEYWORDS: Microelectromechanical systems, Silicon, Ferroelectric materials, Etching, Resistance, Finite element methods, Optical simulations, Wind energy, Platinum, Deep reactive ion etching

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