Dr. Jaeyoung Park
at Nanometrics Korea Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 3, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Electronics, Metrology, Microscopy, Silicon, Inspection, Process control, High volume manufacturing, Phase measurement, Critical dimension metrology, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top