Dr. James J. Alwan
Engineering Director at Carl Zeiss Meditec Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Diffraction, X-ray optics, Optical amplifiers, Spectroscopy, X-rays, X-ray diffraction, X-ray sources, Zone plates, Plasma, Laser systems engineering

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