Dr. James J. Alwan
Engineering Director at Carl Zeiss Meditec Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: X-rays, Plasma, Spectroscopy, Zone plates, Optical amplifiers, X-ray diffraction, X-ray optics, Diffraction, Laser systems engineering, X-ray sources

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