Dr. James M. Blackwell
at Intel Corp
SPIE Involvement:
Author
Publications (16)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Extreme ultraviolet, Etching, Photoresist materials, Extreme ultraviolet lithography, Scanning electron microscopy, Particles, Nanoparticles, Semiconducting wafers, Photoresist processing, Chemically amplified resists

PROCEEDINGS ARTICLE | April 17, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Extreme ultraviolet lithography, Nanoparticles, Extreme ultraviolet, Optical lithography, Metals, Spectroscopy, FT-IR spectroscopy, Scanning electron microscopy, Ultraviolet radiation, Particles

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Atomic force microscopy, Neodymium, Chemistry, Scanning probe microscopy, Ions, Silicon, Scanning electron microscopy, Calibration, Extreme ultraviolet lithography, Transmission electron microscopy

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Line edge roughness, Molecules, Extreme ultraviolet lithography, Scanning electron microscopy, Lithography, Image resolution, Electron beam lithography, Extreme ultraviolet, Chemically amplified resists, Image processing

SPIE Journal Paper | July 12, 2012
JM3 Vol. 11 Issue 3
KEYWORDS: Polymers, Lithography, Extreme ultraviolet, Atomic force microscopy, Semiconducting wafers, Scanning electron microscopy, Extreme ultraviolet lithography, Chemistry, Photoresist materials, Scanners

PROCEEDINGS ARTICLE | March 20, 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Polymers, Lithography, Extreme ultraviolet, Semiconducting wafers, Scanning electron microscopy, Atomic force microscopy, Extreme ultraviolet lithography, Chemistry, Chemically amplified resists, Photoresist materials

Showing 5 of 16 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top