Dr. James W. Blatchford
VP, Design Enablement at GlobalFoundries
SPIE Involvement:
Publications (10)

Proceedings Article | 3 April 2010 Paper
Proceedings Volume 7641, 76410A (2010) https://doi.org/10.1117/12.848350
KEYWORDS: Metals, Double patterning technology, Photomasks, Etching, Optical lithography, Semiconducting wafers, Lithography, Scanning electron microscopy, Optical proximity correction, Fiber optic illuminators

Proceedings Article | 16 March 2009 Paper
Steven Prins, James Blatchford, Oluwamuyiwa Olubuyide, Deborah Riley, Simon Chang, Qi-Zhong Hong, T. Kim, Ricardo Borges, Li Lin
Proceedings Volume 7275, 72750C (2009) https://doi.org/10.1117/12.814947
KEYWORDS: Transistors, Data modeling, Lithography, Process modeling, Computer simulations, Logic, 3D modeling, Device simulation, Manufacturing, Resolution enhancement technologies

Proceedings Article | 13 March 2009 Paper
Proceedings Volume 7275, 72750D (2009) https://doi.org/10.1117/12.814197
KEYWORDS: Metals, Lithography, Photomasks, Optical lithography, Logic, Raster graphics, Resolution enhancement technologies, Computer simulations, Distributed computing, Visualization

Proceedings Article | 17 March 2008 Paper
Proceedings Volume 6925, 69250E (2008) https://doi.org/10.1117/12.774581
KEYWORDS: Lithography, SRAF, Photomasks, Logic, Optical proximity correction, Lithographic illumination, Printing, Critical dimension metrology, Design for manufacturing, Model-based design

Proceedings Article | 17 March 2008 Paper
Proceedings Volume 6925, 692518 (2008) https://doi.org/10.1117/12.772685
KEYWORDS: Optical proximity correction, Semiconducting wafers, SRAF, Lithography, Photomasks, Optical lithography, Lithographic illumination, Image segmentation, Manufacturing, Fiber optic illuminators

Showing 5 of 10 publications
Conference Committee Involvement (4)
Extreme Ultraviolet (EUV) Lithography II
28 February 2011 | San Jose, California, United States
Extreme Ultraviolet (EUV) Lithography
22 February 2010 | San Jose, California, United States
Alternative Lithographic Technologies
24 February 2009 | San Jose, California, United States
Emerging Lithographic Technologies XII
26 February 2008 | San Jose, California, United States
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