Dr. James F. Cameron
Fellow at DuPont Electronics & Imaging
SPIE Involvement:
Conference Program Committee | Author
Publications (38)

Proceedings Article | 23 March 2020
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Carbon, Etching, Polymers, Silicon, Coating, Resistance, Chemical vapor deposition, Reactive ion etching, Thin film coatings, System on a chip

Proceedings Article | 23 March 2020
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Carbon, FT-IR spectroscopy, Etching, Polymers, X-rays, Resistance, Reactive ion etching, System on a chip, Polymer thin films

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Optical lithography, Etching, Argon, Polymers, Resistance, Reflectivity, Photoresist materials, Critical dimension metrology, System on a chip

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Carbon, Etching, Polymers, Coating, Resistance, Chemical vapor deposition, Materials, 193nm lithography

SPIE Journal Paper | 22 June 2018
JM3 Vol. 17 Issue 02
KEYWORDS: Atomic force microscopy, Line edge roughness, Photoresist processing, Photoresist developing, Image processing, Standards development, Photoresist materials, Optical lithography, Polymers, Pulmonary function tests

Showing 5 of 38 publications
Conference Committee Involvement (2)
Advances in Patterning Materials and Processes XXXVIII
21 February 2021 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVII
24 February 2020 | San Jose, California, United States
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