Mr. James A. Carroll
President at Photomask Portal
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 23, 1999
Proc. SPIE. 3665, 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98
KEYWORDS: Semiconductors, Lithography, Reticles, Metrology, Distortion, Image registration, Pellicles, Photomasks, Adhesives, Overlay metrology

PROCEEDINGS ARTICLE | December 18, 1998
Proc. SPIE. 3546, 18th Annual BACUS Symposium on Photomask Technology and Management
KEYWORDS: Semiconductors, Lithography, Reticles, Metrology, Distortion, Image registration, Pellicles, Photomasks, Adhesives, Overlay metrology

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