James Nelson D'Amour
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 June 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Gold, Polymers, Glasses, Dewetting, Luminescence, Interfaces, Silicon, Silicon films, Excimers, Polymer thin films

Proceedings Article | 24 July 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Oxides, Thin films, Data modeling, Polymers, Glasses, Silicon, Photoresist materials, Silicon films, Polymer thin films, Temperature metrology

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