Luminescent thin films are used for many applications, including light-emitting diodes, lasers and flat panel
displays. Glancing angle deposition (GLAD) is a physical vapor deposition technique which relies on highly
oblique flux angles to create porous thin films. When combined with real-time substrate motion control and
measurement of deposition rates, it is possible to produce high quality nanostructered thin films. A rugate filter
uses a sinusoidally varying index profile to produce a stop band. Using the GLAD technique, it is possible to
produce a rugate filter from a single material. The central wavelength, depth and width of the stop band can be
designed by adjusting the film nanostructure. In this paper, rugates composed of Y2O3:Eu are used to control
the angular emission profiles of the photoluminescent thin film. Confined, annular and isotropic emission profiles
film is nearly uniform for emission angles
between ~ -60° and ~60°.
In this paper, we present the growth and optical characterization of the preliminary stages of amorphous silicon square spiral growth on pre-patterned and unpatterned sections of silicon substrates. The periodicity of the seeding was set to 1 μm using electron beam lithography, and a seed enhancement layer was deposited on top of the seeds, followed by a quarter-turn square spiral on top of that. It was found that the optical constants in the wavelength region of 1000 nm to 1700 nm for the film materials were higher for the patterned sections of the film as compared with the unpatterned sections of the film.