James Hamzik
SPIE Involvement:
Publications (5)

Proceedings Article | 25 May 2022 Poster + Paper
Kusum Maharjan, Iou-Sheng Ke, Sabrina Wong, Aiwen Wu, Ying Qi, James Hamzik, Lawrence Chen
Proceedings Volume 12055, 120550V (2022) https://doi.org/10.1117/12.2614308
KEYWORDS: Metals, Iron, Optical lithography, Zinc, Calcium, Sodium, Aluminum, Magnesium, Copper

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11326, 1132613 (2020) https://doi.org/10.1117/12.2551646
KEYWORDS: Metals, Surface plasmons, Contamination, Ions, Molecules, Polymers, Photons, Semiconducting wafers, Photoresist materials, Silicon

Proceedings Article | 13 March 2018 Paper
Aiwen Wu, Tetsu Kohyama, James Hamzik, Saksatha Ly, Jad Jaber
Proceedings Volume 10586, 1058618 (2018) https://doi.org/10.1117/12.2297395
KEYWORDS: Metals, Ions, Lithography, Contamination, Adsorption, Photoresist materials, Semiconducting wafers

Proceedings Article | 27 March 2017 Paper
Tetsu Kohyama, Fumiya Kaneko, Saksatha Ly, James Hamzik, Jad Jaber, Yoshiaki Yamada
Proceedings Volume 10146, 101461J (2017) https://doi.org/10.1117/12.2257388
KEYWORDS: Metals, Polymers, Manufacturing, Contamination, Process control, Surface plasmons, Lithography, Potassium, Chemical reactions, Iron, Adsorption

Proceedings Article | 27 March 2017 Paper
Proceedings Volume 10146, 101462A (2017) https://doi.org/10.1117/12.2258582
KEYWORDS: Lithography, Photoresist materials, Immersion lithography, Semiconducting wafers, Line width roughness, Line edge roughness, Scanning electron microscopy, Particles, Bridges, Finite element methods, Fermium, Frequency modulation

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