Dr. James Hamzik
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Lithography, Contamination, Metals, Ions, Photoresist materials, Adsorption, Semiconducting wafers

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Particles, Scanning electron microscopy, Photoresist materials, Frequency modulation, Finite element methods, Bridges, Line width roughness, Fermium, Immersion lithography, Line edge roughness, Semiconducting wafers

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Potassium, Surface plasmons, Contamination, Iron, Polymers, Metals, Manufacturing, Process control, Adsorption, Chemical reactions

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top