James Lamb
Deputy CTO- Adv Semiconductor Mnf at Brewer Science Inc
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 23 March 2020
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Multilayers, Interfaces, Silicon, Computer simulations, Photoresist materials, Surface properties, Semiconducting wafers

Proceedings Article | 23 March 2020
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Thin films, Lithography, Scattering, Polymers, Coating, Software development, Algorithm development, Semiconducting wafers, Optics manufacturing, Polymer thin films

Proceedings Article | 20 March 2019
Proc. SPIE. 10961, Optical Microlithography XXXII
KEYWORDS: Thin films, Lithography, Optical lithography, Etching, Polymers, Interfaces, Reflectivity, Stochastic processes, Polymer thin films, Absorption

Proceedings Article | 25 June 2014
Proc. SPIE. 9083, Micro- and Nanotechnology Sensors, Systems, and Applications VI
KEYWORDS: Transceivers, Transmitters, Sensors, Magnetism, Receivers, Antennas, Electronic filtering, Environmental sensing, Prototyping, Temperature metrology

Proceedings Article | 24 August 2001
Proc. SPIE. 4345, Advances in Resist Technology and Processing XVIII
KEYWORDS: Lithography, Deep ultraviolet, Optical properties, Etching, Polymers, Coating, Manufacturing, Reflectivity, Photoresist materials, Bottom antireflective coatings

Showing 5 of 16 publications
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