James J. McAneny
Development Mananger at Logitech Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7590, Micromachining and Microfabrication Process Technology XV
KEYWORDS: Semiconducting wafers, Abrasives, Surface finishing, Polishing, Radium, Aluminum, Oxides, Surface roughness, Silicon, Gallium arsenide

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