Dr. James D. Meador
Senior Research Scientist at Brewer Science Inc
SPIE Involvement:
Publications (15)

Proceedings Article | 31 March 2010 Paper
Jim Meador, Alice Guerrero, Joyce Lowes, Charlyn Stroud, Brandy Carr, Anwei Qin, Carlton Washburn, Ramil-Marcelo Mercado
Proceedings Volume 7639, 763926 (2010) https://doi.org/10.1117/12.846927
KEYWORDS: Lithography, Photoresist materials, Silicon, Photoresist developing, Diffusion, Polymers, Lithographic illumination, Scanning electron microscopy, Scanners, Photography

Proceedings Article | 26 March 2010 Paper
Joyce Lowes, Victor Pham, Jim Meador, Charlyn Stroud, Ferdinand Rosas, Ramil-Marcelo Mercado, Mark Slezak
Proceedings Volume 7639, 76390K (2010) https://doi.org/10.1117/12.846608
KEYWORDS: Picosecond phenomena, Photoresist materials, Photoresist developing, Polymers, Lithography, Diffusion, Semiconducting wafers, Standards development, Chemistry, Quenching (fluorescence)

Proceedings Article | 1 April 2009 Paper
Jim Meador, Joyce Lowes, Charlyn Stroud, Sherilyn Thomas, Yilin Qiu, Ramil-Marcelo Mercado, Victor Pham, Mark Slezak
Proceedings Volume 7273, 727312 (2009) https://doi.org/10.1117/12.813783
KEYWORDS: Lithography, Photoresist materials, Photoresist developing, Polymers, Scanning electron microscopy, Antireflective coatings, Interferometers, Polymer thin films, Electroluminescence, Bandpass filters

Proceedings Article | 4 December 2008 Paper
Proceedings Volume 7140, 71402W (2008) https://doi.org/10.1117/12.804743
KEYWORDS: Polymers, Photoresist developing, Polymer thin films, Photoresist materials, Lithography, Coating, Molecules, Bottom antireflective coatings, Electroluminescence, Etching

Proceedings Article | 15 April 2008 Paper
Jim Meador, Carol Beaman, Charlyn Stroud, Joyce Lowes, Zhimin Zhu, Douglas Guerrero, Ramil-Marcelo Mercado, David Drain
Proceedings Volume 6923, 69232W (2008) https://doi.org/10.1117/12.772793
KEYWORDS: Polymers, Lithography, Photoresist developing, Photoresist materials, Electroluminescence, Diffractive optical elements, Reflectivity, Polymer thin films, Optical properties, Scanning electron microscopy

Showing 5 of 15 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top