Dr. James Jaein Moon
at SK Hynix Inc
SPIE Involvement:
Author
Publications (20)

PROCEEDINGS ARTICLE | March 13, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Optical proximity correction, Photomasks, Photoresist processing, Process modeling, Semiconductors, Lithography, Optical lithography, Calibration, Source mask optimization, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | April 16, 2011
Proc. SPIE. 7972, Advances in Resist Materials and Processing Technology XXVIII
KEYWORDS: Optical lithography, Photomasks, Critical dimension metrology, Nanoimprint lithography, Chromium, Etching, Double patterning technology, Scanners, Image processing, Photoresist developing

PROCEEDINGS ARTICLE | March 29, 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Line width roughness, Extreme ultraviolet lithography, Data modeling, Photomasks, Calibration, Extreme ultraviolet, Point spread functions, Lithography, Photoresist materials, Stochastic processes

PROCEEDINGS ARTICLE | March 23, 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Photomasks, Resolution enhancement technologies, Electroluminescence, Optical lithography, Semiconducting wafers, Mask making, Scanning electron microscopy, Lithography, Double patterning technology, Image processing

PROCEEDINGS ARTICLE | March 23, 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: SRAF, Optical proximity correction, Semiconducting wafers, Photomasks, Performance modeling, Electroluminescence, Mask making, Scanning electron microscopy, Wafer testing, Lithography

PROCEEDINGS ARTICLE | March 22, 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Point spread functions, Extreme ultraviolet lithography, Extreme ultraviolet, Light scattering, Surface roughness, Convolution, Projection systems, Photomasks, Stray light, Optical lithography

Showing 5 of 20 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top