Dr. James Oberschmidt
SPIE Involvement:
Publications (21)

Proceedings Article | 18 March 2015 Paper
Ramya Viswanathan, Om Jaiswal, Nathalie Casati, Amr Abdo, James Oberschmidt, Josef Watts, Maria Gabrani
Proceedings Volume 9426, 94260W (2015) https://doi.org/10.1117/12.2086049
KEYWORDS: Statistical modeling, Surface plasmons, Calibration, Data modeling, Optical proximity correction, Metrology, Semiconducting wafers, Optical lithography, Integrated circuit design, Mathematical modeling

Proceedings Article | 31 March 2014 Paper
Nathalie Casati, Maria Gabrani, Ramya Viswanathan, Zikri Bayraktar, Om Jaiswal, David DeMaris, Amr Abdo, James Oberschmidt, Andreas Krause
Proceedings Volume 9052, 90520J (2014) https://doi.org/10.1117/12.2045461
KEYWORDS: Data modeling, Surface plasmons, Calibration, Optical proximity correction, Statistical modeling, Optical lithography, Process modeling, Printing, Image processing, Image quality

Proceedings Article | 12 April 2013 Paper
Proceedings Volume 8683, 86831A (2013) https://doi.org/10.1117/12.2011485
KEYWORDS: Photomasks, 3D modeling, Optical proximity correction, Performance modeling, Data modeling, Calibration, Critical dimension metrology, Metals, Error analysis, Diffraction

Proceedings Article | 23 May 2011 Paper
Proceedings Volume 8081, 80810O (2011) https://doi.org/10.1117/12.897531
KEYWORDS: Photomasks, Data modeling, Calibration, Critical dimension metrology, Optical proximity correction, Process modeling, Semiconducting wafers, Lithography, Polarization, Wafer-level optics

Proceedings Article | 20 May 2011 Paper
Proceedings Volume 8081, 80810T (2011) https://doi.org/10.1117/12.899900
KEYWORDS: SRAF, Electronic design automation, Resolution enhancement technologies, Computer simulations, Current controlled current source

Showing 5 of 21 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top