Mr. James E. Pedder
Strategic Technologist at M-Solv Ltd
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | February 26, 2008
Proc. SPIE. 6879, Photon Processing in Microelectronics and Photonics VII
KEYWORDS: Microlens array, Lenses, Polymers, Laser processing, Surface roughness, Laser ablation, Micromachining, Computer aided design, Pulsed laser operation, Binary data

PROCEEDINGS ARTICLE | March 13, 2007
Proc. SPIE. 6458, Photon Processing in Microelectronics and Photonics VI
KEYWORDS: Lithography, Calibration, Ultraviolet radiation, Laser processing, Surface roughness, Laser ablation, Photoresist materials, Photomasks, Excimer lasers, Pulsed laser operation

PROCEEDINGS ARTICLE | March 7, 2007
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Diamond turning, Polymers, Ultraviolet radiation, Laser development, Surface roughness, Laser ablation, Photomasks, Excimer lasers, Micromachining, Halftones

PROCEEDINGS ARTICLE | June 7, 2006
Proc. SPIE. 6261, High-Power Laser Ablation VI
KEYWORDS: Microelectromechanical systems, Polishing, Laser ablation, Photomasks, Excimer lasers, Micromachining, Computer aided design, Critical dimension metrology, Radium, Surface finishing

PROCEEDINGS ARTICLE | March 1, 2006
Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V
KEYWORDS: Microelectromechanical systems, Optical lithography, Data modeling, Etching, Polymers, Laser ablation, Photoresist materials, Wave propagation, Solids, Excimer lasers

PROCEEDINGS ARTICLE | April 12, 2005
Proc. SPIE. 5713, Photon Processing in Microelectronics and Photonics IV
KEYWORDS: Microelectromechanical systems, Silicon, Laser processing, Laser applications, Nd:YAG lasers, Semiconductor lasers, Photomasks, Excimer lasers, Micromachining, Computer aided design

Showing 5 of 7 publications
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