Dr. James A. Slinkman
Advisory Engineer at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 19, 2004
Proc. SPIE. 5551, Quantum Communications and Quantum Imaging II
KEYWORDS: Oxides, Thin films, Silicon, Physics, Silicon films, Capacitance, Field effect transistors, Molybdenum, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Metrology, Statistical analysis, Calibration, Error analysis, Manufacturing, Atomic force microscopy, Scanning electron microscopy, Transmission electron microscopy, Scatterometry, Capacitance

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