Dr. James P. Spallas
Principal at KLA Corp
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 16 September 2014
Proc. SPIE. 9236, Scanning Microscopies 2014
KEYWORDS: Wafer-level optics, Electron beams, Lenses, Silicon, Manufacturing, Monte Carlo methods, Objectives, Tolerancing, Optics manufacturing, Charged particle optics

Proceedings Article | 22 May 2009
Proc. SPIE. 7378, Scanning Microscopy 2009
KEYWORDS: Lithography, Electron beams, Silicon, Manufacturing, Image resolution, Optical testing, Scanning electron microscopy, Objectives, Optical simulations, Beam shaping

Proceedings Article | 25 October 2004
Proc. SPIE. 5604, Optomechatronic Micro/Nano Components, Devices, and Systems
KEYWORDS: Microelectromechanical systems, Mirrors, Beam steering, Switches, Electrodes, Matrices, Ceramics, Manufacturing, Free space optics, Tolerancing

Proceedings Article | 6 June 1995
Proc. SPIE. 2426, 9th Meeting on Optical Engineering in Israel
KEYWORDS: Electron beam lithography, Optical lithography, Etching, Electrodes, Metals, Crystals, Dielectrics, Silicon, Scanning electron microscopy, Photomicroscopy

Proceedings Article | 19 May 1995
Proc. SPIE. 2437, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V
KEYWORDS: Optical components, Diffraction, Fringe analysis, Interferometers, Wavefronts, Optical testing, Photomasks, Extreme ultraviolet, Zone plates, EUV optics

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