This paper is a review of the recently introduced slab-coupled-optical-waveguide laser, a high-power, high-brightness semiconductor laser source that emits light in a single-spatial, lowest-order mode that is nearly circular in cross section and has a modal diameter of several micrometers. Such lasers have been demonstrated in InGaAs-InP materials, emitting near 1.3-μm wavelength, and in AlGaAs-InGaAs-GaAs materials, emitting at several wavelengths in the range between 915 and 980 nm. CW output power over 1 W has been obtained in diffraction limited beams with over 80% coupling efficiency to single-mode optical fibers. This coupling is achieved by simple butt coupling of the fiber directly to the laser without the use of optical lenses.
Joseph Donnelly, Robin Huang, James Walpole, Leo Missaggia, Christopher Harris, Robert Bailey, Jason Plant, Daniel Mull, William Goodhue, Patrick Taylor, Antonio Napoleone, George Turner
A high-brightness semiconductor diode laser design, which utilizes a slab-coupled optical waveguide region to achieve several potentially important advances in performance, is described and experimentally demonstrated using simple rib waveguide quantum well structures. These lasers operate in a large, low-aspect-ratio, lowest-order spatial mode, which can be butt coupled to a single-mode fiber with very high coupling efficiency. The acronym used for this new type of structure is SCOWL, taken from "slab-coupled optical waveguide laser". Initial results on 1.3μmm InGaAsP/InP and 980-nm AlGaAs/InGaAs SCOWLs are presented.
Recent progress in tapered high-brightness lasers emitting in the near infrared region from 1.3 to 2.0 micrometers is reviewed. Improved power and beam quality are obtained for tapered lasers operating near 1.55 micrometers using Gaussian distributed lateral carrier injection profiles. Results for high-brightness 9-element arrays of tapered lasers emitting near 2.0 micrometers are included. Also included is a discussion of the use of mass-transported microlenses for collimating the output of the astigmatic tapered devices and coupling them into optical fibers.
Semiconductor lasers with tapered gain regions are well suited for applications requiring high output powers and good spatial mode quality. In this paper, the development of 1.5-micrometer InGaAsP/InP quantum well (QW) material suitable for this type of device will be discussed and initial results on high-power tapered lasers fabricated in this material presented. Several different 1.5-micrometer QW laser structures grown by metalorganic chemical vapor deposition are being evaluated. Structures containing three compressively strained QWs have shown transparency current densities JT as low as 170 A/cm2 and net gains of approximately equal 40 cm-1 at less than 800 A/cm2. With 5QWs, these parameters were JT approximately equals 275 A/cm2 and net gain approximately 40 cm-1 at 600 A/cm2, respectively. Self-focusing at high current densities and high intensity input into the taper section has been identified as a fundamental problem in these devices that has to be dealt with. Tapered devices with a 0.6-mm-long single-mode gain section coupled to a 1.4-mm-long tapered region fabricated in 5QW material have shown CW output powers of greater than 1.0 W at 3.8 A. Approximately 80% of the 1 W is in the near- diffraction-limited central lobe of the far field-pattern.
Strained single-quantum-well GaInAsSb/AlGaAsSb diode lasers have exhibited room-temperature threshold current densities as low as 50 A/cm2, one of the lowest values reported for diode lasers at room temperature. These lasers, grown by molecular beam epitaxy, have emission wavelengths of approximately 2.05 micrometers, characteristic temperature of 65 K, internal quantum efficiency of 95%, and internal loss coefficient of 7 cm-1. Single-ended cw power of 1 W is obtained for a 100-micrometer-wide broad-stripe laser. Tapered lasers with a 140-micrometer aperture have exhibited diffraction-limited cw power up to 600 mW.
Tapered structures fabricated in InGaAsP/InP 1.3-micrometers quantum-well material have been evaluated as lasers and as high-gain high-saturation-power amplifiers. The devices, which had a 1-mm-long ridge-waveguide gain section followed by a 2-mm-long tapered gain region, demonstrated > 1 W output power as lasers, with > 85% of the power in a central diffraction-limited lobe. The amplifiers had an unsaturated gain of 26 dB at 2.0 A and about 30 dB at 2.8 A. Saturated output power at 2.8 A was > 750 mW. At 2.0-A drive current and approximately equals 10-mW input power, the relative intensity noise of the amplified signal was <EQ -160 dB/Hz at frequencies >= 2 GHz.
Semiconductor laser devices with tapered gain regions have recently generated much interest because they promise high output power with near-diffraction-limited spatial beam quality and good electrical to optical conversion efficiency. We report recent progress on two specific applications: a ring laser and a high- power erbium-doped fiber amplifier (EDFA). The ring laser operates unidirectionally in a single longitudinal mode with an output power of 170 mW and without a Faraday isolator. The high- power EDFA has an output power of 520 mW at 1.55 micrometers , the highest power reported to dates for an erbium-doped fiber amplifier using all semiconductor pump lasers. The common theme for both of these applications is the development of optical systems that produce high power in near-diffraction-limited collimated beams and efficient coupling into single mode optical fiber. We present an experimental procedure for quantitatively predicting the optical fiber power coupling efficiency. We have measured 64% power coupling efficiency measure fiber fact to power in the single-mode fiber, or 51% laser facet to power in the fiber, in good agreement with the predictions.
The recent development of semiconductor diode optical amplifiers and lasers having a laterally tapered gain region has changed the outlook for high-power semiconductor optical sources. For the first time, highbrightness, single-element, all-semiconductor sources which emit several watts of cw power in a nearly ideal, single-lobed, diffraction-limited beam have been demonstrated. As semiconductor sources these devices have the inherent advantages of high efficiency, small size, light weight, and reliability. The amplifier12 and all-semiconductor master-oscillator power-amplifier (MOPA) devices34 have gain regions linearly tapered from a few micrometers at the amplifier input to several hundred micrometers at the output. Device lengths are typically 2 mm or more. The angle of the taper is chosen to match the diffraction angle of the input beam which has its waist near the narrow end of the taper. Such a structure is shown schematically in Fig. 1 . The etched grooves have angled side walls and act as cavity spoilers, designed to prevent oscillation of the device as a broad-area laser. The devices are fabricated in single-quantum-well strained-layer InGaAs/AlGaAs graded-index separate-confinement heterostructure laser wafers grown by organometallic vapor phase epitaxy.5 The tapered devices also operate as laser oscillators6 by increasing the input facet reflectivity. For amplifiers, both the input and output facets are coated for low reflectivity (in Fig. 1 , Ri = R2 = 1%), but for oscillators, the input facet is left uncoated (R1 —30%). The oscillators also emit several watts of cw power into a nearly single-lobed, nearly diffraction-limited beam, though their beam quality is usually somewhat inferior to that obtained for amplifiers, particularly at the highest output powers. The lateral mode of the oscillator is similar to the modes described by Fox and Li7 for unstable resonators, except that the semiconductor medium has a significant effect on the self-consistent mode which oscillates. A beam propagation calculation has been carried out to model these effects, as described below. This paper includes a review of the properties of both tapered amplifiers and oscillators.
The OMVPE growth and performance of graded-index separate-confinement heterostructure strained quantum-well InGaAs-AlGaAs diode lasers are reviewed. Broad-stripe lasers have exhibited Jth as low as 60 A cm-2 for a cavity length L equals 1500 micrometers and differential quantum efficiency (eta) d as high as 90% for L equals 300 micrometers . Similar heterostructures have been used to fabricate traveling wave amplifiers with a laterally tapered gain region that emit over 1 W cw in a nearly diffraction-limited spatial lobe at 0.98 micrometers , linear arrays of 200-micrometers -long uncoated ridge-waveguide lasers with average threshold currents of 4 mA and (eta) d approximately 90%, and high-power broad-stripe lasers with power conversion efficiency exceeding 50% at 75 degree(s)C.
Diode lasers with InGaAs strained-layer quantum wells and GaInP cladding layers for operation at 980 nm have been investigated. Two types of device structure, differing in the optical-waveguide material have been grown by organometallic vapor phase epitaxy. Threshold current densities as low as 85 A/cm2 and differential efficiencies as high as 93% have been measured on broad-area devices. Mass transport of GaInP and GaInAsP alloys has been used to fabricate buried-heterostructure lasers with threshold currents as low as 3 mA and output powers of 30 mW/facet for uncoated devices. Threshold currents of 7 mA and single spatial mode output power in excess of 50 mW/facet have been obtained for uncoated, ridge-waveguide lasers.
Performance trends in the development of monolithic two-dimensional, coherent grating surface emitting (GSE) laser arrays are presented. Such GSE arrays now operate continuously to more than 3 W/surface and pulsed to more than 30 W/surface. They have obtained cw threshold current densities of under 140 A/cm2 with cw differential quantum efficiencies of 20 to 30% per surface. Linewidths in the 50 MHz range have been obtained with output powers of up to 270 mW per surface. The arrays typically consist of 10 to 30 mutually injection coupled gain sections with 10 laterally coupled ridge-guided lasers in each gain section. A single GaInAs strained-layer quantum well with a graded index separate confinement heterostructure geometry allows junction down mounting with light emission through the transparent GaAs substrate. A surface relief grating is used for feedback and outcoupling.
Small fast lenslet arrays have been fabricated in GaP and lnP substrates. These semiconductors have high refractive indices (n3) and are transparent at A. 0. 55 p. m and 0. 93 jim respectively. Diffractioniimited performance has been obtained from small-diameter (''60-130 pin) f/1 refractive lenslet arrays fabricated by the mass transport process. These lenslets are ideal for use with diode laser sources and can be readily included in monolithic integration schemes. An example of each of these applications is presented. Binary diffractive lenslets fabricated in lnP are also described. The need for small fast high quality lenslets has become apparent over the last few years with the development of diode laser sources and in particular diode laser arrays. Since diode lasers typically have a beam divergence of several tens of degrees collimating the output beams generally leads to greatly improved far-field patterns. The preferred substrate for lenslet fabrication has been fused silica on which both diffractive1 and refractive2 lenslets have been investigated with good results. However the small index of refraction of quartz (n . 5) can present problems with high aspect ratio features such as the outer rings of Fresnel zone plates. In this paper we describe the fabrication and performance of f/I microlenses fabricated on semiconductors where n" 3. Binary Fresnel lenslets were fabricated in lnP by wet etching while InP and GaP were used to fabricate refractive lenslets
Two-dimensional surface-emitting AlGaAs diode laser array modules, each containing two 1 sq cm hybrid arrays, have been fabricated and tested. For quasi-CW operation, peak output powers greater than 300 W/sq cm appear to be easily achievable at repetition rates up to 500 Hz. The measurements also indicate that CW output powers of 100-150 W/sq cm can be achieved from these arrays.
Large-numerical-aperture microlenses have been fabricated in compound semiconductors by chemical etching and mass transport (surface-energy minimization) and have been monolithically integrated with GaInAsP/InP surface-emitting lasers. The microlenses showed smooth surface, accurate profiles, and near diffraction-limited beam collimation. Techniques have been developed for accurate alignment between microlenses and buried-heterostructure waveguide gain regions fabricated on opposite sides of a substrate. The integrated devices showed room-temperature pulsed threshold currents of 70 mA, narrow beam divergence of 1.25 deg, and are potentially advantageous for fiber coupling, optical interconnects, laser-array applications, etc.
Coherent operation of a monolithic linear array of InGaAsP buried—heterostructure lasers operating at X = 1.3 .un has been achieved by means of a spatial filter in an external cavity. An array of mass—transported InP microlenses was used to collimate the beams of the individual laser elements and couple the laser array output to the external cavity. The coherent array output exhibited a narrow (3.2 mrad), three—lobe far-field pattern with —65% of the energy concentrated in the central peak.
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