Dr. James E. Webb
Manager Microlithography Optics at Corning Incorporated
SPIE Involvement:
Author
Publications (19)

Proceedings Article | 21 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Polarization, 3D modeling, Photomasks, Image resolution, Lithography, 3D image processing, Refraction, Imaging systems, Lithographic illumination, Birefringence

Proceedings Article | 26 August 2005
Proc. SPIE. 5874, Current Developments in Lens Design and Optical Engineering VI
KEYWORDS: Combined lens-mirror systems, Birefringence, Objectives, Chemical elements, Wavefronts, Calcium, Reflectivity, Microfluidics, Polarization, Optical design

Proceedings Article | 28 June 2005
Proc. SPIE. 5853, Photomask and Next-Generation Lithography Mask Technology XII
KEYWORDS: Polarization, 3D modeling, Photomasks, Image resolution, Lithography, 3D image processing, Refraction, Lithographic illumination, Imaging systems, Birefringence

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Polarization, Interfaces, Refraction, Birefringence, Wavefronts, Objectives, 3D modeling, Absorption, Silica, Plano

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Birefringence, Spinel, Crystals, Transmittance, Oxides, Absorption, Immersion lithography, Water, Ultraviolet radiation, Ceramics

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Monochromatic aberrations, Wavefronts, Optics manufacturing, Manufacturing, Optical alignment, Birefringence, Phase measurement, Lithography, Reticles, Error analysis

Showing 5 of 19 publications
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