Dr. James R. Webster
at Qualcomm MEMS Technologies
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 January 2004
Proc. SPIE. 5344, MEMS/MOEMS Components and Their Applications
KEYWORDS: Microelectromechanical systems, Carbon, Diamond, Switches, Electrodes, Metals, Annealing, Dielectrics, Capacitance, Bridges

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