James L. Wood
Manager of Product at Rigaku Innovative Technologies Inc
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Thin films, Multilayers, Sputter deposition, Particles, Ions, Reflectivity, Ion beams, Photomasks, Extreme ultraviolet, Thin film coatings

Proceedings Article | 28 August 2003 Paper
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Thin films, Multilayers, Sputter deposition, Particles, Ions, Reflectivity, Ion beams, Photomasks, Extreme ultraviolet, Thin film coatings

Proceedings Article | 13 November 1998 Paper
Proc. SPIE. 3447, Advances in Mirror Technology for Synchrotron X-Ray and Laser Applications
KEYWORDS: Mirrors, Multilayers, X-ray optics, Reflection, X-rays, Coating, Reflectivity, Platinum, Silicon carbide, X-ray lithography

Proceedings Article | 1 November 1997 Paper
Proc. SPIE. 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors
KEYWORDS: Mirrors, Multilayers, Sputter deposition, X-rays, Silicon, Coating, Reflectivity, Angiography, Synchrotrons, Silicon carbide

SPIE Journal Paper | 1 January 1995
OE Vol. 34 Issue 01
KEYWORDS: Multilayers, Telescopes, Reflectors, Coating, Gold, Space telescopes, Reflector telescopes, X-ray telescopes, Reflectivity, Reflection

Showing 5 of 17 publications
Proceedings Volume Editor (5)

SPIE Conference Volume | 3 November 2004

SPIE Conference Volume | 23 December 2003

SPIE Conference Volume | 8 November 2001

SPIE Conference Volume | 1 February 1994

SPIE Conference Volume | 23 November 1992

Conference Committee Involvement (5)
X-Ray Sources and Optics
2 August 2004 | Denver, Colorado, United States
Crystals, Multilayers, and Other Synchrotron Optics
5 August 2003 | San Diego, California, United States
Neutron Optics
2 August 2001 | San Diego, CA, United States
Multilayer and Grazing Incidence X-Ray/EUV Optics II
14 July 1993 | San Diego, CA, United States
Neutron Optical Devices and Applications
22 July 1992 | San Diego, CA, United States
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