Mr. James Word
Director at Mentor Graphics Corp
SPIE Involvement:
Author
Publications (54)

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Logic, Optical lithography, Visualization, Etching, Metals, Error analysis, Manufacturing, Monte Carlo methods, Solids, Photomasks, Directed self assembly, Optical proximity correction, Resolution enhancement technologies

PROCEEDINGS ARTICLE | October 3, 2016
Proc. SPIE. 9985, Photomask Technology 2016
KEYWORDS: Lithography, Metals, Image processing, Manufacturing, Data processing, Process control, Photomasks, Cadmium sulfide, Optical proximity correction, Semiconducting wafers

SPIE Journal Paper | September 29, 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Directed self assembly, Lens design, Optical lithography, Immersion lithography, Photomasks, Neck, Lithography, Critical dimension metrology, Visualization, Optical proximity correction

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Code division multiplexing, Neck, Lithography, Optical lithography, Modulation, Visualization, Ions, Lens design, Optical resolution, Photomasks, Extreme ultraviolet, Directed self assembly, Immersion lithography, Neodymium, Semiconducting wafers

PROCEEDINGS ARTICLE | March 18, 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Finite-difference time-domain method, Manufacturing, 3D modeling, Printing, Image quality, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, SRAF, Semiconducting wafers, Model-based design, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Etching, Metals, Dielectrics, Manufacturing, Image quality, Bridges, Design for manufacturing, Photomasks, Double patterning technology, Optical proximity correction, SRAF, Tolerancing, Overlay metrology, Design for manufacturability

Showing 5 of 54 publications
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