Dr. James Jiahua Yu
Senior Process Engineer at Applied Materials Inc
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 4 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Oxides, Lithography, Optical lithography, Etching, Silicon, Photomasks, Extreme ultraviolet lithography, Double patterning technology, Immersion lithography, 193nm lithography

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Oxides, Lithography, Optical lithography, Etching, Resistance, Scanning electron microscopy, Photoresist materials, Photomasks, Double patterning technology, Line edge roughness

Proceedings Article | 15 April 2008
Proc. SPIE. 6923, Advances in Resist Materials and Processing Technology XXV
KEYWORDS: Lithography, Optical lithography, Ultraviolet radiation, Coating, Printing, Photoresist materials, Double patterning technology, Photoresist processing, Semiconducting wafers, Floods

Proceedings Article | 22 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Metrology, Etching, Scanning electron microscopy, Process control, Line width roughness, Double patterning technology, Critical dimension metrology, Line edge roughness, Semiconducting wafers, Edge roughness

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