Dr. Jan-Uwe Schmidt
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Publications (16)

Proceedings Article | 7 March 2014
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Mirrors, Modulation, Silica, Imaging systems, Electrodes, Copper, Laser processing, Laser applications, Semiconductor lasers, Spatial light modulators

Proceedings Article | 16 February 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Mirrors, Continuous wave operation, Electrodes, Laser applications, Reflectivity, Modulators, Microopto electromechanical systems, Micromirrors, Surface properties, Printed circuit board testing

Proceedings Article | 14 May 2010
Proc. SPIE. 7718, Optical Micro- and Nanometrology III
KEYWORDS: Laser sources, Diffraction, Mirrors, Homogenization, Deep ultraviolet, Imaging systems, Cameras, Reflectivity, Micromirrors, Spherical lenses

Proceedings Article | 14 May 2010
Proc. SPIE. 7716, Micro-Optics 2010
KEYWORDS: Actuators, Near infrared, Electron beam lithography, Mirrors, Electronics, Deep ultraviolet, Metals, Reflectivity, Control systems, Micromirrors

Proceedings Article | 19 May 2009
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Thin films, Diffraction, Sputter deposition, Crystals, X-ray diffraction, Silicon, Microopto electromechanical systems, Finite element methods, Aluminum nitride, Semiconducting wafers

Proceedings Article | 19 February 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Actuators, Mirrors, Optical lithography, Deep ultraviolet, Electrodes, Dielectrics, Spatial light modulators, Micromirrors, Aluminum, Laser systems engineering

Showing 5 of 16 publications
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