Dr. Jan Doise
at imec
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 25 March 2019
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Optical lithography, Silicon

SPIE Journal Paper | 22 August 2018
JM3 Vol. 17 Issue 03
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Tomography, System on a chip, Chemistry, Scanning transmission electron microscopy, Transmission electron microscopy, Semiconducting wafers, 3D image processing

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Polymethylmethacrylate, Chemistry, Transmission electron microscopy, Tomography, 3D metrology, Directed self assembly, Picosecond phenomena, Semiconducting wafers, System on a chip, Scanning transmission electron microscopy

Proceedings Article | 19 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Thin films, Lithography, Polymethylmethacrylate, Annealing, Directed self assembly, High volume manufacturing, Nanolithography, Thin film manufacturing, Resolution enhancement technologies, Temperature metrology

Proceedings Article | 19 March 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Optical lithography, Spectroscopy, Silicon, Chromium, Reactive ion etching, Semiconducting wafers, Scanning transmission electron microscopy

Showing 5 of 17 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top