Dr. Jan Doise
Senior Process Engineer at Inpria Corp
SPIE Involvement:
Author
Publications (21)

Proceedings Article | 26 February 2021 Presentation + Paper
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII
KEYWORDS: Oxides, Lithography, Optical lithography, Metals, Scanners, Scanning electron microscopy, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Photoresist processing

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11609, Extreme Ultraviolet (EUV) Lithography XII

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithography, Optical lithography, Etching, Annealing, Materials processing, Scanning electron microscopy, Printing, Extreme ultraviolet, Directed self assembly, Stochastic processes

Proceedings Article | 22 February 2021 Presentation
Proc. SPIE. 11612, Advances in Patterning Materials and Processes XXXVIII
KEYWORDS: Lithography, Optical lithography, Etching, Annealing, Materials processing, Scanning electron microscopy, Printing, Extreme ultraviolet, Directed self assembly, Stochastic processes

Proceedings Article | 25 March 2019 Presentation + Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Optical lithography, Silicon

Showing 5 of 21 publications
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