Dr. Jan Engelmann
at KLA-Tencor GmbH
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Modeling, Etching, Silicon, Transmission electron microscopy, Scatterometry, Microelectronics, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Single crystal X-ray diffraction

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