Jan V. Hermans
Researcher at imec
SPIE Involvement:
Publications (39)

Proceedings Article | 21 November 2023 Poster + Paper
Richard van Haren, Steffen Steinert, Orion Mouraille, Oktay Yildirim, Jan Hermans, Leon van Dijk, Dirk Beyer
Proceedings Volume 12751, 127511A (2023) https://doi.org/10.1117/12.2687307
KEYWORDS: Overlay metrology, Metrology, Image registration, Semiconducting wafers, Zoom lenses, Scanning electron microscopy, Scanners, Optical alignment, Environmental sensing

Proceedings Article | 5 October 2023 Paper
Oktay Yildirim, Richard van Haren, Orion Mouraille, Ilirjan Aliaj, Jan Hermans, Christiane Jehoul
Proceedings Volume 12802, 128020Q (2023) https://doi.org/10.1117/12.2675473
KEYWORDS: Etching, Semiconducting wafers, Overlay metrology, Plasma, Chemistry, Reticles, Polymers, Ions, Discontinuities, Polymerization

Proceedings Article | 29 May 2023 Presentation + Paper
Proceedings Volume 12498, 1249809 (2023) https://doi.org/10.1117/12.2658418
KEYWORDS: Semiconducting wafers, Particles, Contamination, Extreme ultraviolet lithography, Scanners, Displays, Extreme ultraviolet, Printing, Industry, Optical lithography

Proceedings Article | 1 December 2022 Presentation + Paper
Richard van Haren, Steffen Steinert, Orion Mouraille, Ewa Kasperkiewicz, Jan Hermans, Mahmudul Hasan, Leon van Dijk, Dirk Beyer
Proceedings Volume 12293, 122930L (2022) https://doi.org/10.1117/12.2641618
KEYWORDS: Photomasks, Semiconducting wafers, Logic, Image registration, Overlay metrology, Scanners, Metrology, Scanning electron microscopy, Optical alignment, Logic devices

Proceedings Article | 25 May 2022 Poster + Paper
Richard van Haren, Oktay Yildirim, Orion Mouraille, Leon van Dijk, Kaushik Kumar, Yannick Feurprier, Christiane Jehoul, Jan Hermans
Proceedings Volume 12056, 120560D (2022) https://doi.org/10.1117/12.2614255
KEYWORDS: Etching, Overlay metrology, Ions, Semiconducting wafers, Scanners, Polymers, Chemistry, Photomasks

Showing 5 of 39 publications
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