Prof. Jan Paradies
at Univ Paderborn
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 January 2019
Proc. SPIE. 11043, Fifth Conference on Sensors, MEMS, and Electro-Optic Systems
KEYWORDS: Semiconductors, Gold, Thin films, Optical lithography, Electrodes, Dielectrics, Photoresist materials, Transistors, Semiconducting wafers, Indium oxide

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