Jan Paul studied material science at the University of Applied Sciences Jena and received his diploma degree 2003. In 2007 he received his diploma degree in process engineering at the Dresden University of Technology. In 2004 he started his work in field of plasma etching at the Advanced Mask Technology Center GmbH & Co. KG (AMTC) in Dresden. He joined the Fraunhofer Center for Nanoelectronic Technologies in 2007 and is currently working toward his Ph.D. in electrical engineering at the Dresden University of Technology. His research focuses on plasma etch processing of new materials, especially for scalable nonvolatile memories.