Jan H. C. Sedlacek
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Publications (26)

SPIE Journal Paper | January 1, 2005
JM3 Vol. 4 Issue 01
KEYWORDS: Nanoparticles, Polymers, Pellicles, Absorbance, Polymer thin films, Nanocomposites, Particles, Transparency, Lithography, Silica

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Thin films, Ellipsometry, Data modeling, X-rays, Optical coatings, Surface roughness, Atomic force microscopy, Spectroscopic ellipsometry, Thin film coatings, Fluorine

PROCEEDINGS ARTICLE | May 12, 2004
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Thin films, Ellipsometry, Lithography, Metrology, Birefringence, Ultraviolet radiation, Optical coatings, Laser irradiation, Spectroscopic ellipsometry, Thin film coatings

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Antireflective coatings, Glasses, Laser induced damage, Calcium, Coating, Beam delivery, Laser irradiation, Laser optics, Pulsed laser operation

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Antireflective coatings, Contamination, Sulfur, Diffusion, Oxygen, Photoresist materials, Iodine, Absorbance, Pulsed laser operation, Liquids

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Thin films, Antireflective coatings, Contamination, Sensors, Optical coatings, Oxygen, Laser irradiation, Thin film coatings, Fluorine, Absorption

Showing 5 of 26 publications
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