Jan H. C. Sedlacek
SPIE Involvement:
Author
Publications (26)

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Thin films, Ellipsometry, Lithography, Metrology, Birefringence, Ultraviolet radiation, Optical coatings, Laser irradiation, Spectroscopic ellipsometry, Thin film coatings

SPIE Journal Paper | 1 January 2005
JM3 Vol. 4 Issue 01
KEYWORDS: Nanoparticles, Polymers, Pellicles, Absorbance, Polymer thin films, Nanocomposites, Particles, Transparency, Lithography, Silica

Proceedings Article | 28 May 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Thin films, Ellipsometry, Data modeling, X-rays, Optical coatings, Surface roughness, Atomic force microscopy, Spectroscopic ellipsometry, Thin film coatings, Fluorine

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Lithography, Antireflective coatings, Glasses, Laser induced damage, Calcium, Coating, Beam delivery, Laser irradiation, Laser optics, Pulsed laser operation

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Antireflective coatings, Contamination, Sulfur, Diffusion, Oxygen, Photoresist materials, Iodine, Absorbance, Pulsed laser operation, Liquids

Showing 5 of 26 publications
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