Dr. Jana Clerico
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Lithography, Optical lithography, Image processing, Particles, Manufacturing, Inspection, Image classification, Thin film coatings, Semiconducting wafers, Classification systems

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Ellipsometry, Metrology, Deep ultraviolet, Etching, Silicon, Reflectivity, Transmission electron microscopy, Reflectometry, Process control, Semiconducting wafers

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