Prof. Jane P. Chang
Associate Professor at Univ of California/Los Angeles
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 28, 2007
Proc. SPIE. 6521, Design for Manufacturability through Design-Process Integration
KEYWORDS: Lithography, Monochromatic aberrations, Etching, Manufacturing, Design for manufacturing, Photomasks, Computer aided design, Process modeling, Device simulation, Chemical mechanical planarization

PROCEEDINGS ARTICLE | November 23, 2005
Proc. SPIE. 6002, Nanofabrication: Technologies, Devices, and Applications II
KEYWORDS: Thin films, Metals, Luminescence, Ions, Doping, Adsorption, Atomic layer deposition, Erbium, Active optics, Absorption

PROCEEDINGS ARTICLE | January 19, 2005
Proc. SPIE. 5592, Nanofabrication: Technologies, Devices, and Applications
KEYWORDS: Oxides, Optical lithography, Etching, Metals, Dielectrics, Ions, Silicon, Plasma etching, Chlorine, Plasma

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