Janet Greene
at Cadence Design Systems
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 10, 2003
Proc. SPIE. 5042, Design and Process Integration for Microelectronic Manufacturing
KEYWORDS: Lithography, Reticles, Metals, Silicon, Manufacturing, Inspection, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

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