Janghee Lee
at Seoul National Univ
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | October 10, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Overlay metrology, Image processing, Semiconductors, Semiconducting wafers, Detection and tracking algorithms, Algorithm development, Quantization, Reliability, Image segmentation, Scanning electron microscopy

SPIE Journal Paper | September 14, 2012
JEI Vol. 21 Issue 3
KEYWORDS: Defect detection, Binary data, Detection and tracking algorithms, Semiconducting wafers, Scanning electron microscopy, Image processing, Inspection, Optimization (mathematics), Image analysis, Expectation maximization algorithms

PROCEEDINGS ARTICLE | May 6, 2010
Proc. SPIE. 7723, Optics, Photonics, and Digital Technologies for Multimedia Applications
KEYWORDS: Image processing algorithms and systems, Data modeling, Image segmentation, Image processing, Feature extraction, Computer science, Scanning electron microscopy, Computer engineering, Semiconducting wafers, Statistical modeling

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