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Dr. Jangik Park
Senior Engineer at SAMSUNG Electronics Co Ltd
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Publications (1)
Proceedings Article | 5 April 2007 Paper
High-resolution in-die metrology using beam profile reflectometry and ellipsometry
Chungsam Jun, Jangik Park, Jon Opsal, Heath Pois, In-Kyo Kim, Jung-Wook Kim, Lena Nicolaides
Proceedings Volume 6518, 65183D (2007) https://doi.org/10.1117/12.712516
KEYWORDS: Metrology, Data modeling, Data acquisition, Reflectometry, Ellipsometry, Critical dimension metrology, Standards development, Spectroscopic ellipsometry, Process control, Artificial neural networks
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