Dr. Janusz A. Murakowski Profile

Dr. Janusz A. Murakowski

Senior Scientist at Phase Sensitive Innovations, Inc.

SPIE Involvement:

Author

Publications (61)

Proceedings Article | 13 March 2024 Presentation

Multicore asymmetric star-routing (MASTR) switch

Janusz Murakowski, Timothy Creazzo, Chase Stine, Charles Harrity, Anna Bortle, Kevin Shreve, Samhit Dontamsetti, Dennis Prather

Proceedings Volume PC12891, PC1289104 (2024) https://doi.org/10.1117/12.3002091

KEYWORDS: Circuit switching, Phased array optics, Waveguides, Stars, Radio optics, Photonic integrated circuits, Integrated optics, Optical switching, Matrix multiplication, Switches

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Proceedings Article | 3 October 2022 Presentation

Ultra-wideband photonic spectrometer for PBL sensing

Mehmet Ogut, Sidharth Misra, Shannon Brown, Siamak Forouhar, Janusz Murakowski, Michael Gehl

Proceedings Volume 12232, 1223207 (2022) https://doi.org/10.1117/12.2632853

KEYWORDS: Spectroscopy, Photonic integrated circuits, Photodetectors, Ocean optics, Microwave radiation, Atmospheric modeling, Waveguides, Stars, Solar energy, Radio optics

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Proceedings Article | 7 March 2022 Presentation + Paper

Fiber-based arrayed waveguide grating for spectral sensing

Hannah West, Janusz Murakowski, Dennis Prather

Proceedings Volume 12000, 120000H (2022) https://doi.org/10.1117/12.2610329

KEYWORDS: Waveguides, Free space optics, Image processing, Microwave radiation, Cameras, Atmospheric optics, V band, Ocean optics, Modulators, Signal processing

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Proceedings Article | 7 March 2022 Presentation + Paper

Optical processing for phased-array and beamspace mapping

Janusz Murakowski, Garrett Schneider, Dennis Prather

Proceedings Volume 12000, 120000G (2022) https://doi.org/10.1117/12.2613480

KEYWORDS: Antennas, Phased array optics, Phased arrays, Free space optics, Receivers, Radio optics, Optics manufacturing, Imaging systems, Semiconductors, Transmitters, RF photonics, Space division multiplexing, Wireless communications

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Proceedings Article | 7 March 2022 Presentation + Paper

Progress toward instantaneous microwave photonic spatial-spectral localization

William Beardell, Garrett Schneider, Janusz Murakowski, Dennis Prather

Proceedings Volume 12000, 120000B (2022) https://doi.org/10.1117/12.2614027

KEYWORDS: Antennas, Free space optics, Point spread functions, Optical arrays, Electroluminescence, Imaging systems, Waveguides, Fourier transforms, Channel projecting optics, Spatial frequencies

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Proceedings Article | 7 March 2014 Paper

A widely tunable narrow linewidth RF source utilizing an integrated heterogeneous photonic module

David Grund, Garrett Schneider, Janusz Murakowski, Dennis Prather

Proceedings Volume 8985, 898519 (2014) https://doi.org/10.1117/12.2039446

KEYWORDS: Silicon, Oscillators, Modulation, Etching, Signal generators, Silicon photonics, Phase shift keying, Modulators, Photodetectors, Gold

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Proceedings Article | 7 March 2014 Paper

Dual slot modulator for millimeter wave photonics

Matthew Konkol, Stephen Kozacik, David L. Eng, Brock Overmiller, Mathew Zablocki, Benjamin Olbricht, Janusz Murakowski, Shouyuan Shi, Ahmed Sharkawy, Dennis Prather

Proceedings Volume 8983, 898317 (2014) https://doi.org/10.1117/12.2038208

KEYWORDS: Silicon, Modulators, Modulation, Waveguides, Electro optics, Electrodes, Dielectrics, Extremely high frequency, Photonics, Titanium dioxide

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Proceedings Article | 7 March 2014 Paper

Ultrabroadband phased-array radio frequency (RF) receivers based on optical techniques

Brock Overmiller, Christopher Schuetz, Garrett Schneider, Janusz Murakowski, Dennis Prather

Proceedings Volume 8985, 89850U (2014) https://doi.org/10.1117/12.2037910

KEYWORDS: Signal processing, Phased array optics, Receivers, Imaging systems, Radio optics, Diodes, Heterodyning, Phased arrays, Sensors, Optical modulators

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Proceedings Article | 1 February 2014 Paper

Linearized broadband optical detector: study and implementation of optical phase-locked loop

Janusz Murakowski, Garrett Schneider, Christopher Schuetz, Shouyuan Shi, Dennis Prather

Proceedings Volume 9007, 90070N (2014) https://doi.org/10.1117/12.2036368

KEYWORDS: Sensors, Analog electronics, Signal detection, Phase shift keying, Linear filtering, Modulators, Phase modulation, Optical fibers, Modulation, Signal processing

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Proceedings Article | 27 March 2013 Paper

Toward a widely tunable narrow linewidth RF source utilizing an integrated heterogenous silicon photonic module

David Grund, Garrett Ejzak, Garrett Schneider, Janusz Murakowski, Shouyuan Shi, Dennis Prather

Proceedings Volume 8624, 86240K (2013) https://doi.org/10.1117/12.2005916

KEYWORDS: Silicon, Oscillators, Modulation, Modulators, Silicon photonics, Laser development, Photonics, Photodetectors, Etching, Laser applications

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Proceedings Article | 27 March 2013 Paper

Progress towards dual vertical slot modulator for millimeter wave photonics

Stephen Kozacik, Maciej Murakowski, Matthew Konkol, Suman Addya, David L. Eng, Benjamin Olbricht, Mathew Zablocki, Ahmed Sharkawy, Janusz Murakowski, Shouyuan Shi, Dennis Prather

Proceedings Volume 8624, 86240Y (2013) https://doi.org/10.1117/12.2004978

KEYWORDS: Silicon, Waveguides, Modulators, Etching, Electron beam lithography, Photomasks, Optical alignment, Lithography, Photonics, Titanium dioxide

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Proceedings Article | 3 May 2012 Paper

Toward a widely tunable narrow linewidth RF source through heterogenous silicon photonic integration

Garrett Ejzak, David Grund, Garrett Schneider, Janusz Murakowski, Shouyuan Shi, Dennis Prather

Proceedings Volume 8397, 839709 (2012) https://doi.org/10.1117/12.919384

KEYWORDS: Silicon, Waveguides, Photodiodes, Modulators, Oscillators, Semiconductor lasers, Optical alignment, Silicon photonics, Reflectors, Brain-machine interfaces

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Proceedings Article | 29 February 2012 Paper

System modeling of passive millimeter wave imager based on optical up-conversion

Shouyuan Shi, Christopher Schuetz, Rick Martin, Tom Dillon, Peng Yao, Janusz Murakowski, Garrett Schneider, Dennis Prather

Proceedings Volume 8255, 82551O (2012) https://doi.org/10.1117/12.914312

KEYWORDS: Imaging systems, Extremely high frequency, Antennas, Mathematical modeling, Electro optical modeling, Systems modeling, Performance modeling, Modulators, Channel projecting optics, Integrated optics

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Proceedings Article | 28 February 2012 Paper

Dual vertical slot modulator for millimeter wave photonics

Stephen Kozacik, David L. Eng, Mathew Zablocki, Michael Roman, Ahmed Sharkawy, Janusz Murakowski, Benjamin Olbricht, Shouyuan Shi, Dennis Prather

Proceedings Volume 8259, 82590D (2012) https://doi.org/10.1117/12.914425

KEYWORDS: Waveguides, Electro optics, Modulation, Silicon, Electron beam lithography, Modulators, Extremely high frequency, Electrodes, Polymethylmethacrylate, Titanium dioxide

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Proceedings Article | 28 February 2012 Paper

Integrated silicon-photonic module for generating widely tunable, narrow-line RF using injection-locked lasers

David Grund, Garrett Schneider, Garrett Ejzak, Janusz Murakowski, Shouyuan Shi, Dennis Prather

Proceedings Volume 8259, 825906 (2012) https://doi.org/10.1117/12.914467

KEYWORDS: Silicon, Modulation, Oscillators, Semiconductor lasers, Tunable lasers, Neodymium, Modulators, Etching, RF photonics, Silicon photonics

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Proceedings Article | 24 February 2012 Paper

Passive millimeter-wave holography enabled by optical up-conversion

Janusz Murakowski, Garrett Schneider, Dennis Prather

Proceedings Volume 8259, 825903 (2012) https://doi.org/10.1117/12.909424

KEYWORDS: Extremely high frequency, Optical fibers, Antennas, Imaging systems, Charge-coupled devices, Phase shift keying, Free space optics, Modulators, Millimeter wave imaging, Holography

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Proceedings Article | 26 May 2011 Paper

3D rendering of passive millimeter-wave scenes using modified open source software

Maciej Murakowski, John Wilson, Janusz Murakowski, Garrett Schneider, Christopher Schuetz, Dennis Prather

Proceedings Volume 8022, 80220B (2011) https://doi.org/10.1117/12.884240

KEYWORDS: Imaging systems, Polarization, Extremely high frequency, Dielectric polarization, 3D modeling, Interfaces, Absorption, Reflection, Scattering, Atmospheric propagation

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Proceedings Article | 5 May 2009 Paper

Passive millimeter-wave cross polarization imaging and phenomenology

E. Lee Stein, Christopher Schuetz, Richard Martin, Jesse Samluk, John Wilson, Daniel Mackrides, Janusz Murakowski, Maciej Murakowski, Dennis Prather

Proceedings Volume 7309, 730902 (2009) https://doi.org/10.1117/12.819033

KEYWORDS: Polarization, Extremely high frequency, Imaging systems, Dielectric polarization, Passive millimeter wave imaging, Reflectivity, Reflection, Image processing, Upconversion, 3D modeling

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Proceedings Article | 24 February 2009 Paper

A novel fabrication method for semiconductor ring lasers that ensures optimal electrical pumping

Neilanjan Dutta, Jaya Prakash Gupta, Janusz Murakowski, Dennis Prather

Proceedings Volume 7204, 720404 (2009) https://doi.org/10.1117/12.809715

KEYWORDS: Metals, Etching, Semiconductor lasers, Electrodes, Resonators, Photomasks, Silica, Waveguides, Semiconductors, Polymers

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Proceedings Article | 4 April 2008 Paper

Processing and modeling optimization for grayscale lithography

Thomas Dillon, Mathew Zablocki, Janusz Murakowski, Dennis Prather

Proceedings Volume 6923, 69233B (2008) https://doi.org/10.1117/12.773213

KEYWORDS: Photoresist materials, Photomasks, Photoresist developing, Lithography, Absorbance, Etching, Grayscale lithography, Picture Archiving and Communication System, Glasses, Process modeling

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Proceedings Article | 26 February 2008 Paper

Micromachining of a fiber-to-waveguide coupler using grayscale lithography and through-wafer etch

Thomas Dillon, Mathew Zablocki, Shouyan Shi, Janusz Murakowski, Dennis Prather

Proceedings Volume 6882, 688206 (2008) https://doi.org/10.1117/12.764036

KEYWORDS: Etching, Mirrors, Optical fibers, Waveguides, Semiconducting wafers, Photoresist materials, Silicon, Photomasks, Glasses, Polarization

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For some time, the micro-optics and photonics fields have relied on fabrication processes and technology borrowed from the well-established silicon integrated circuit industry. However, new fabrication methodologies must be developed for greater flexibility in the machining of micro-optic devices. To this end, we have explored grayscale lithography as an enabler for the realization of such devices. This process delivers the ability to sculpt materials arbitrarily in three dimensions, thus providing the flexibility to realize optical surfaces to shape, transform, and redirect the propagation of light efficiently. This has opened the door for new classes of optical devices. As such, we present a fiber-to-waveguide coupling structure utilizing a smoothly contoured lensing surface in the device layer of a silicon-on insulator (SOI) wafer, fabricated using grayscale lithography. The structure collects light incident normally to the wafer from a singlemode optical fiber plugged through the back surface and turns the light into the plane of the device layer, focusing it into a single-mode waveguide. The basis of operation is total internal reflection, and the device therefore has the potential advantages of providing a large bandwidth, low polarization sensitivity, high efficiency, and small footprint. The structure was optimized with a simulated annealing algorithm in conjunction with two-dimensional finite-difference time-domain (FDTD) simulation accelerated on the graphics processing unit (GPU), and achieves a theoretical efficiency of approximately seventy percent, including losses due to Fresnel reflection from the oxide/silicon interface. Initial fabrication results validate the principle of operation. We discuss the grayscale fabrication process as well as the through-wafer etch for mechanical stabilization and alignment of the optical fiber to the coupling structure. Refinement of the through-wafer etch process for high etch rate and appropriate sidewall taper are addressed.

Proceedings Article | 1 May 2007 Paper

Sparse aperture millimeter-wave imaging using optical detection and correlation techniques

C. Schuetz, R. Martin, I. Biswas, M. Mirotznik, S. Shi, G. Schneider, J. Murakowski, D. Prather

Proceedings Volume 6548, 65480B (2007) https://doi.org/10.1117/12.719811

KEYWORDS: Imaging systems, Antennas, Extremely high frequency, Image resolution, Modulation, Cameras, Millimeter wave imaging, Heterodyning, Modulators, Electrooptic modulators

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Proceedings Article | 7 March 2007 Paper

Fabrication of photonic crystals using chemical lithography

Peng Yao, Maciej Murakowski, Lindsay Prather, Garrett Schneider, Janusz Murakowski, Dennis Prather

Proceedings Volume 6462, 64620R (2007) https://doi.org/10.1117/12.701473

KEYWORDS: Liquids, Lithography, Optical lithography, Photonic crystals, Solids, Photoresist processing, Silicon, Etching, Chemical reactions, Photoresist materials

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Proceedings Article | 9 February 2007 Paper

Efficient fiber to waveguide coupling structure for optical systems integration using grayscale lithography

Thomas Dillon, Caihua Chen, Janusz Murakowski, Dennis Prather

Proceedings Volume 6478, 64780O (2007) https://doi.org/10.1117/12.701150

KEYWORDS: Waveguides, Silicon, Absorbance, Etching, Photomasks, Glasses, Grayscale lithography, Silicon photonics, Fiber couplers, Calibration

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Proceedings Article | 19 May 2006 Paper

Optical techniques for sparse-aperture millimeter-wave imaging

C. Schuetz, M. Mirotznik, S. Shi, G. Schneider, J. Murakowski, D. Prather

Proceedings Volume 6211, 62110G (2006) https://doi.org/10.1117/12.666070

KEYWORDS: Imaging systems, Sensors, Phased array optics, Optical filters, Modulators, Antennas, Optical fibers, Signal detection, Phase shift keying, Integrated optics

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Proceedings Article | 18 May 2006 Paper

Three-dimensional near-IR photonic crystals for optical interconnects using conventional silicon microfabrication techniques

Bhargav Citla, Sriram Venkataraman, Janusz Murakowski, Shouyuan Shi, Garrett Schneider, Dennis Prather

Proceedings Volume 6232, 62320L (2006) https://doi.org/10.1117/12.666764

KEYWORDS: Etching, Dispersion, Silicon, Spherical lenses, Photonic crystals, Photomasks, Optical lithography, Optical interconnects, Reactive ion etching, Anisotropic etching

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Proceedings Article | 23 March 2006 Paper

Micro/nano lithography realized by chemical printing

Peng Yao, Garrett Schneider, Janusz Murakowski, Maciej Murakowski, Dennis Prather

Proceedings Volume 6151, 61511N (2006) https://doi.org/10.1117/12.655692

KEYWORDS: Lithography, Optical lithography, Solids, Etching, Scanning electron microscopy, Photomicroscopy, Silicon, Photoresist materials, Chemical reactions, Nanoimprint lithography

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Proceedings Article | 7 March 2006 Paper

Electro-optic modulator optimization for optically based passive millimeter-wave detection

C. Schuetz, C. Huang, R. Shireen, T. Hwang, G. Scheider, J. Murakowski, D. Prather

Proceedings Volume 6120, 612007 (2006) https://doi.org/10.1117/12.646565

KEYWORDS: Modulators, Sensors, Electrodes, Lithium niobate, Modulation, Waveguides, Etching, Electro optics, Electrooptic modulators, Dielectrics

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Proceedings Article | 1 March 2006 Paper

Experimental demonstration of self-collimation in a 3D photonic crystal

Zhaolin Lu, Shouyuan Shi, Janusz Murakowski, Garrett Schneider, Christopher Schuetz, Dennis Prather

Proceedings Volume 6128, 61281T (2006) https://doi.org/10.1117/12.646687

KEYWORDS: Photonic crystals, Radio propagation, Electromagnetic radiation, 3D metrology, Signal attenuation, Dispersion, Collimation, Sensors, Microwave radiation, Waveguides

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Proceedings Article | 24 February 2006 Paper

Fabrication and characterization of AlGaAs/GaAs multiquantum well ring lasers

Binglin Miao, Shouyuan Shi, Janusz Murakowski, Caihua Chen, Dennis Prather

Proceedings Volume 6123, 61230Z (2006) https://doi.org/10.1117/12.647210

KEYWORDS: Waveguides, Semiconductor lasers, Quantum wells, Semiconductors, Etching, Photoresist materials, Semiconducting wafers, Gallium arsenide, Laser damage threshold, Integrated optics

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Proceedings Article | 23 January 2006 Paper

Fabrication of three-dimensional near-IR photonic crystals using deep-UV contact photolithography and silicon micromachining

Bhargav Citla, Sriram Venkataraman, Janusz Murakowski, Garrett Schneider, Dennis Prather

Proceedings Volume 6109, 610903 (2006) https://doi.org/10.1117/12.647154

KEYWORDS: Etching, Spherical lenses, Photomasks, Optical lithography, Silicon, Photonic crystals, Deep ultraviolet, Anisotropic etching, Micromachining, Plasma

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Proceedings Article | 23 January 2006 Paper

Investigation of the III-V oxidation process for the fabrication of sub-micron three dimensional photonic devices

Kierthi Swaminathan, Janusz Murakowski, Chris Schuetz, Garrett Schneider, Bhargav Citla, Dennis Prather

Proceedings Volume 6110, 61100P (2006) https://doi.org/10.1117/12.647157

KEYWORDS: Aluminum, Photonic crystals, Gallium arsenide, Etching, Gallium, Photomasks, Chromium, Oxides, Lithography, Oxidation

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Proceedings Article | 23 January 2006 Paper

Fabrication of tapered air-core defects in 3D photonic crystals for multifunctional scanning-probe NSOM tips

Garrett Schneider, Janusz Murakowski, Dennis Prather

Proceedings Volume 6110, 61100I (2006) https://doi.org/10.1117/12.647470

KEYWORDS: Waveguides, Silicon, Near field scanning optical microscopy, Lithography, Photonic crystals, Ultraviolet radiation, Electron beam lithography, Coating, Chemical vapor deposition, Near field optics

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Proceedings Article | 7 November 2005 Paper

Applications of optical upconversion to sparse aperture millimeter-wave imaging

C. Schuetz, M. Mirotznik, S. Shi, G. Schneider, J. Murakowski, D. Prather

Proceedings Volume 5989, 59891C (2005) https://doi.org/10.1117/12.630664

KEYWORDS: Imaging systems, Sensors, Antennas, Signal to noise ratio, Modulation, Modulators, Signal detection, Spatial resolution, Signal processing, Optical filters

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Proceedings Article | 19 May 2005 Paper

Modeling and design of coupled cavity for the electro-optical modulators

Shouyuan Shi, Christopher Schuetz, Binlin Miao, Janusz Murakowski, Dennis Prather

Proceedings Volume 5789, (2005) https://doi.org/10.1117/12.604084

KEYWORDS: Extremely high frequency, Modulation, Gallium arsenide, Modulators, Electrodes, Dielectrics, Electro optics, Refractive index, Waveguides, Resonators

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Proceedings Article | 19 May 2005 Paper

Noise limitations in millimeter wave detection via optical upconversion

C. Schuetz, G. Schneider, J. Murakowski, D. Prather

Proceedings Volume 5789, (2005) https://doi.org/10.1117/12.602378

KEYWORDS: Optical amplifiers, Sensors, Photodetectors, Radio optics, Thermography, Upconversion, Optical filters, Fiber amplifiers, Interference (communication), Modulators

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Proceedings Article | 13 April 2005 Paper

Self-collimation in 3D photonic crystals

Dennis Prather, Shouyuan Shi, Sriram Venkataraman, Zhaolin Lu, Janusz Murakowski, Garrett Schneider

Proceedings Volume 5733, (2005) https://doi.org/10.1117/12.587824

KEYWORDS: Dispersion, Photonic crystals, Etching, Radio propagation, Photomasks, Silicon, Wave propagation, Optical spheres, Electromagnetism, Fabrication

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SPIE Journal Paper | 1 April 2005

Fabrication of silicon microring resonators with narrow coupling gaps

Binglin Miao, Peng Yao, Janusz Murakowski, Dennis Prather

JM3, Vol. 4, Issue 02, 023013, (April 2005) https://doi.org/10.1117/12.10.1117/1.1898605

KEYWORDS: Microrings, Resonators, Silicon, Waveguides, Lithography, Polymethylmethacrylate, Chromium, Tunable lasers, Electron beams, Photomasks

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Proceedings Article | 22 January 2005 Paper

Etching three-dimensional photonic crystals in GaAs

Janusz Murakowski, Chris Schuetz, Garrett Schneider, Dennis Prather

Proceedings Volume 5720, (2005) https://doi.org/10.1117/12.591282

KEYWORDS: Aluminum, Photonic crystals, Etching, Gallium arsenide, Crystals, Oxides, Spherical lenses, Lithography, Quantum wells, Oxidation

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Proceedings Article | 22 January 2005 Paper

Fabrication of three-dimensional Yablonovite photonic crystals by multiple-exposure UV interference lithography

Garrett Schneider, Eric Wetzel, Janusz Murakowski, Dennis Prather

Proceedings Volume 5720, (2005) https://doi.org/10.1117/12.591090

KEYWORDS: Lithography, Photomasks, Diffraction gratings, Photonic crystals, Ultraviolet radiation, Photoresist materials, Optical alignment, Scanning electron microscopy, Dielectrics, Interferometry

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Proceedings Article | 25 October 2004 Paper

Design, simulation, and fabrication of 3D self-collimation photonic crystals

Dennis Prather, Sriram Venkataraman, Shouyuan Shi, Garrett Schneider, Janusz Murakowski

Proceedings Volume 5595, (2004) https://doi.org/10.1117/12.580857

KEYWORDS: Etching, Photonic crystals, Dispersion, Photomasks, Silicon, Anisotropic etching, Reactive ion etching, Fabrication, Micromachining, Radio propagation

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SPIE Journal Paper | 1 October 2004

Continuous-tone grayscale mask fabrication using high-energy-beam-sensitive glass

Thomas Dillon, Anita Sure, Janusz Murakowski, Dennis Prather

JM3, Vol. 3, Issue 04, (October 2004) https://doi.org/10.1117/12.10.1117/1.1793156

KEYWORDS: Absorbance, Glasses, Photomasks, Lithography, Photoresist processing, Photoresist materials, Mask making, Optical lithography, Etching, Calibration

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Proceedings Article | 9 July 2004 Paper

Ultralow-loss photonic crystal waveguides based on the self-collimation effect

Dennis Prather, Caihua Chen, Shouyuan Shi, Binglin Miao, David Pustai, Sriram Venkataraman, Ahmed Sharkawy, Garrett Schneider, Janusz Murakowski

Proceedings Volume 5360, (2004) https://doi.org/10.1117/12.518370

KEYWORDS: Photonic crystals, Waveguides, Wave propagation, Light wave propagation, Finite-difference time-domain method, Gaussian beams, Dispersion, Silicon, Computer simulations, Beam propagation method

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Proceedings Article | 9 July 2004 Paper

Effective index method in modeling of high-index-contrast planar photonic crystals

Caihua Chen, Shouyuan Shi, Janusz Murakowski, Dennis Prather

Proceedings Volume 5360, (2004) https://doi.org/10.1117/12.524298

KEYWORDS: Photonic crystals, Waveguides, Refractive index, Computer simulations, Interfaces, Planar waveguides, Cladding, Wave propagation, Waveguide modes, Dispersion

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Proceedings Article | 10 June 2004 Paper

Fiber-to-waveguide evanescent coupler for planar integration of silicon optoelectronic devices

Zhaolin Lu, Peng Yao, Sriram Venkataraman, David Pustai, Chunchen Lin, Garrett Schneider, Janusz Murakowski, Shouyuan Shi, Dennis Prather

Proceedings Volume 5358, (2004) https://doi.org/10.1117/12.526627

KEYWORDS: Waveguides, Silicon, Polishing, Fiber couplers, Prisms, Optoelectronic devices, Semiconducting wafers, Electromagnetism, Reflection, Cladding

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Proceedings Article | 30 December 2003 Paper

Three-dimensional photolithography based on image reversal

Peng Yao, Garrett Schneider, Binglin Miao, Janusz Murakowski, Dennis Prather

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524654

KEYWORDS: Picture Archiving and Communication System, Image processing, Optical lithography, Lithography, Absorption, 3D image processing, Photoresist materials, Ultraviolet radiation, Microelectromechanical systems, Photomasks

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