Dr. Jasmeet S. Chawla
at Intel Corp
SPIE Involvement:
Author
Publications (3)

SPIE Journal Paper | January 6, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Scattering, Synchrotrons, Sensors, Time metrology, X-rays, Data modeling, Signal to noise ratio, Laser scattering, Statistical modeling, Metrology

PROCEEDINGS ARTICLE | April 14, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Electron beams, Metrology, 3D modeling, Scanning electron microscopy, Transmission electron microscopy, Monte Carlo methods, 3D metrology, Process control, Model-based design, 3D image processing

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9054, Advanced Etch Technology for Nanopatterning III
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Copper, Dielectrics, Chemistry, Process control, Critical dimension metrology, Plasma

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