Dr. Jason O. Clevenger
Principal Scientist at Exponent Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (7)

PROCEEDINGS ARTICLE | February 18, 2008
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Microelectromechanical systems, Packaging, Accelerated life testing, Switches, Sensors, Electrodes, Dielectrics, Reliability, Diagnostics, Signal detection

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Statistical analysis, Diffractive optical elements, Etching, Quartz, Ions, Photomasks, Phase measurement, Reactive ion etching, Plasma, Phase shifts

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Diffractive optical elements, Data modeling, Etching, Dry etching, Photomasks, Critical dimension metrology, Chlorine, Semiconducting wafers, Prototyping

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Signal to noise ratio, Principal component analysis, Calibration, Etching, Spectroscopy, Chromium, Neural networks, Photomasks, Charge-coupled devices, Photoresist processing

PROCEEDINGS ARTICLE | December 17, 2003
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Data modeling, Etching, Particles, Electrons, Ions, Oxygen, Photomasks, Plasma etching, Chlorine, Plasma

PROCEEDINGS ARTICLE | August 28, 2003
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Etching, Dry etching, Chemistry, Chromium, Photomasks, Aluminum, Plasma etching, Semiconducting wafers, Signal detection, Plasma

Showing 5 of 7 publications
Conference Committee Involvement (4)
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
25 January 2010 | San Francisco, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
28 January 2009 | San Jose, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
21 January 2008 | San Jose, California, United States
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
23 January 2007 | San Jose, California, United States
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