Jason Osborne
Principal Engineer at Bruker Nano, Inc.
SPIE Involvement:
Publications (14)

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12053, PC120530C (2022) https://doi.org/10.1117/12.2614219
KEYWORDS: Critical dimension metrology, Metrology, Scanning electron microscopy, Photoresist materials, Optical proximity correction, Process modeling, Data modeling, Photomasks, Lithography, Extreme ultraviolet lithography

Proceedings Article | 2 April 2020 Presentation + Paper
Proceedings Volume 11325, 1132514 (2020) https://doi.org/10.1117/12.2551931
KEYWORDS: Atomic force microscopy, Metrology, Transmission electron microscopy, Gallium arsenide, 3D metrology, Measurement devices, Scanning electron microscopy, Semiconducting wafers, Visualization, X-ray optics

Proceedings Article | 20 March 2020 Presentation + Paper
Proceedings Volume 11325, 113250T (2020) https://doi.org/10.1117/12.2551623
KEYWORDS: Line edge roughness, Metrology, Atomic force microscopy, Extreme ultraviolet, Semiconducting wafers, Scatterometry, Critical dimension metrology, Stochastic processes, Calibration, Scanning electron microscopy

Proceedings Article | 16 April 2019 Presentation + Paper
Shimon Levi, Ishai Schwarzband, Angela Karvtsov, Matan Tobayas, Hans-Jurgen Stock, Thomas Muelders, Sean Hand, Jason Osborne
Proceedings Volume 10959, 109591L (2019) https://doi.org/10.1117/12.2514666
KEYWORDS: 3D modeling, Sensors, Scanning electron microscopy, Atomic force microscopy, Metrology, 3D metrology, Signal detection, Calibration, Electrons, Optical proximity correction

Proceedings Article | 18 March 2016 Paper
Padraig Timoney, Xiaoxiao Zhang, Alok Vaid, Sean Hand, Jason Osborne, Eric Milligan, Adam Feinstein
Proceedings Volume 9778, 97781A (2016) https://doi.org/10.1117/12.2220152
KEYWORDS: Atomic force microscopy, Semiconducting wafers, 3D metrology, Transmission electron microscopy, Metrology, Pulmonary function tests, Metals, Scatterometry, Diffractive optical elements, Overlay metrology

Showing 5 of 14 publications
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