We propose a facile approach to fabricate graphene nano-objects (GNOs) using interference lithography (IL) and direct
self-assembly of nanoparticles. Uniformly spaced parallel photoresist (PR) lines and periodic hole arrays are proposed as
an etch mask for producing graphene nanoribbons (GNRs), and graphene nanomesh (GNM), respectively. In a different
experiment, the PR line arrays are transferred to uniform oxide channels, and silica nanoparticle dispersions with an
average size of 10 nm are spun on the patterned surface, leaving a monolayer uniform nanoparticle assembly on the
graphene. Following the particle deposition, the graphene is removed in the narrow spacing between the particles, using
the O2 plasma etch, leaving ordered graphene quantum dot (GQD) arrays. The IL technique and etch process enables
tuning the GNOs dimensions.