Mr. Jay Chih-Chieh Chen
at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 24, 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Metrology, Cadmium, Etching, Atomic force microscopy, Scanning electron microscopy, Spectroscopic ellipsometry, Transistors, Critical dimension metrology, Semiconducting wafers, Single crystal X-ray diffraction

PROCEEDINGS ARTICLE | July 15, 2003
Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing
KEYWORDS: Wafer-level optics, Semiconductors, Multilayers, Spectroscopy, Crystals, Germanium, Gallium arsenide, Silicon, Fiber optic communications, Semiconducting wafers

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